Distortion optimized focusing mirror device with large aperture

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 20-27

  Mescheder, Ulrich M ^a   Estañ, Carlos ^a   Somogyi, Gergoe ^a   Freudenreich, Markus ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

Author keywords

Electrostatic focusing device; FEM simulation; MOEMS; SOI

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY;

ELECTROSTATIC FOCUSING DEVICE; FEM SIMULATION; MOEMS;

MIRRORS;

EID: 33745830108     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.034     Document Type: Article

References (15)

1. Marxer C., and de Rooij N.F. Micro-opto-mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation. J. Lightwave Technol. 17 1 (1999) 2-6
2. Herding M., Somogyi G., Mescheder U., and Woias P. A new micromachined optical fiber switch for instrumentation purposes. Proceedings of the Photonics Europe 2004. Strasbourg, France (2004) 264-273
3. Li J., Zhang Q.X., and Liu A.Q. Advanced fiber optical switches using deep RIE (DRIE) fabrication. Sens. Actuators A: Phys. 102 3 (2003) 286-295
4. Mignardi M. Digital micromirror array for projection TV. Solid State Technol. (1994) 63-68
5. Bifano T.G., Perreault J., Krishnamoorthy Mali R., and Horenstein M.N. Microelectro-mechanical deformable mirrors. IEEE J. Select. Top. Quant. Electron. 5 1 (1999) 83-89
6. Mansell J., and Byer R.L. Micromachined silicon deformable mirror. SPIE Adaptive Optical System Technologies. SPIE Proceedings, vol. 3353 (1998) 896-901
7. Vdovin G., and Loktev M. Deformable mirror with thermal actuators. Opt. Soc. Am. Opt. Lett. 27 9 (2002)
8. Himmer P., and Dickensheets D. Micromachined silicon nitride deformable mirrors for focus control. Opt. Lett. 26 16 (2001) 1280-1282
9. Vdovin G., and Sarro P.M. Flexible mirror micromachined in silicon. Appl. Opt. 34 16 (1995)
10. Timoshenko S. Theory of Plates and Shells. 2nd ed. (1989), McGraw-Hill
11. Roark R.J., Budynas R.G., and Young W.C. Roark's Formulas for Stress and Strain. 7th ed. (2001), McGraw-Hill Professional
12. Dickensheets D.L., Himmer P.A., Friholm R.A., and Lutzenberger B.J. Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration. SPIE Proc. 4178 (2000) 90-97
13. Fernández E.J., and Artal P. Membrane deformable mirror for adaptive optics: performance limits in visual optics. Opt. Express 11 9 (2003) 1056-1069
14. Renard S. Industrial MEMS on SOI. J. Micromech. Microeng. 10 (2000) 245-249
15. In: Heuberger A. (Ed). Mikromechanik (1991), Springer-Verlag, Berlin 45