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Volumn 32, Issue 20, 1999, Pages 2692-2702

Rough-surface capacitor: approximations of the capacitance with elementary functions

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; ELECTRODES; FUNCTIONS; PERTURBATION TECHNIQUES; SURFACE ROUGHNESS; SURFACES;

EID: 0343091336     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/20/317     Document Type: Article
Times cited : (24)

References (7)
  • 2
    • 0001352949 scopus 로고    scopus 로고
    • Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile
    • Huang Y, Williams C C and Smith H 1996 Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile J. Vac. Sci. Technol. B 14 433-6
    • (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 433-436
    • Huang, Y.1    Williams, C.C.2    Smith, H.3
  • 3
    • 36449009560 scopus 로고
    • Charge storage in a nitride-oxide-silicon medium by scanning capacitance microscopy
    • Barrett R C and Quate C F 1991 Charge storage in a nitride-oxide-silicon medium by scanning capacitance microscopy J. Appl. Phys. 70 2725-33
    • (1991) J. Appl. Phys. , vol.70 , pp. 2725-2733
    • Barrett, R.C.1    Quate, C.F.2
  • 6
    • 0031673999 scopus 로고    scopus 로고
    • An investigation into the applicability of perturbation techniques to solve the boundary integral equations for a parallel-plate capacitor with a rough electrode
    • García-Valenzuela A, Bruce N C and Kouznetsov D 1998 An investigation into the applicability of perturbation techniques to solve the boundary integral equations for a parallel-plate capacitor with a rough electrode J. Phys. D: Appl. Phys. 31 240-51
    • (1998) J. Phys. D: Appl. Phys. , vol.31 , pp. 240-251
    • García-Valenzuela, A.1    Bruce, N.C.2    Kouznetsov, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.