The influence of surface topography on the electromechanical characteristics of parallel-plate MEMS capacitors

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 1068-1075

  Kogut, Lior ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; PLATES (STRUCTURAL COMPONENTS); POLYCRYSTALLINE MATERIALS; SILICON; SOLID STATE DEVICES; SURFACE ROUGHNESS;

MEMS CAPACITORS; MICROELECTRONIC CAPACITORS; ROUGHNESS EFFECTS; SURFACE AREA;

SURFACE TOPOGRAPHY;

EID: 24144439790     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/025     Document Type: Article

References (35)

1. Sattler R, Voigt P, Pradel H and Wachutka G 2001 Innovative design and modelling of a micromechanical relay with electrostatic actuation J. Micromech. Microeng. 11 428-33
2. Huanga J-M, Liu A Q, Dengb Z L, Zhang Q X, Ahna J and Asundi A 2004 An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors Sensors Actuators A 115 159-67
3. Haas C H and Kraft M 2004 Modelling and analysis of a MEMS approach to dc voltage step-up conversion J. Micromech. Microeng. 14 S114-22
4. Mitcheson P D, Miao P, Stark B H, Yeatman E M, Holmes A S and Green T C 2004 MEMS electrostatic micropower generator for low frequency operation Sensors Actuators A 115 523-9
5. Mou J Q, Lu Y, Yang J P, Li Q H and Guo G X 2004 Design, fabrication and characterization of single crystal silicon microactuator for hard disk drives J. Micromech. Microeng. 14 1608-13
6. Lee A P, McConaghy C F, Sommargren G, Krulevitch P and Campbell E W 2003 Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry J. Microelectromech. Syst. 12 960-71
7. Bao M-H 2000 Handbook of Sensors and Actuators, vol. 8: Micro Mechanical Transducers Pressure Sensor, Accelerometers, and Gyroscopes ed S Middelhoek (New York: Elsevier)
8. Li B, Zhu C and Liu J 1999 Electrostatic force influenced by space charge in submicrometer or nanometer silicon microstructures J. Micromech. Microeng. 9 319-23
9. Nemirovsky Y and Bochobza-Degani O 2001 A methodology and model for the pull-in parameters of electrostatic actuators J. Microelectromech. Syst. 10 601-15
10. Zhang L X and Zhao Y-P 2003 Elecromechanical model of RF MEMS switches Microsyst. Technol. 9 420-6
11. Palasantzas G and Barnas J 1997 Surface-roughness fractality effects in electrical conductivity of single metallic and semiconducting films Phys. Rev. B 56 7726-31
12. 2/Si interface roughness on gate current Microelectron. Reliab. 41 1903-7
13. Reisinger H and Spitzer A 1996 Electrical breakdown induced by silicon nitride roughness in thin oxide-nitride-oxide films J. Appl. Phys. 79 3028-34
14. García-Valenzuela A, Bruce N C and Kouznetsov D 1998 An investigation into the applicability of perturbation techniques to solve the boundary integral equations for a parallel-plate capacitor with a rough electrode. J. Phys. D: Appl. Phys. 31 240-51
15. Zhao Y-P, Wang G-C, Lu T M, Palasantzas G and De Hosson J Th M 1999 Surface-roughness effect on capacitance and leakage current of an insulating film Phys. Rev. B 15 9157-64
16. Bruce N C, García-Valenzuela A and Kouznetsov D 1999 Rough-surface capacitor: approximations of the capacitance with elementary functions J. Phys. D: Appl. Phys. 32 2692-702
17. Palasantzas G and De Hosson J Th M 2001 The effect of mound roughness on the electrical capacitance of a thin insulating film Solid State Commun. 118 203-6
18. Patrikar R M, Dong C Y and Zhuanga W 2002 Modelling interconnects with surface roughness Microelectron. J. 33 929-34
19. Patrikar R M 2004 Modeling and simulation of surface roughness Appl. Surf. Sci. 228 213-20
20. Phinney L M, Lin G, Wellman J and Garcia A 2004 Surface roughness measurements of micromachined polycrystalline silicon films J. Micromech. Microeng. 14 927-31
21. Komvopoulos K and Yan W 1998 Three-dimensional elastic plastic fractal analysis of surface adhesion in microelectromechanical systems J. Tribol. 120 808-13
22. McCarthy B, Adams G G, McGruer N E and Potter D 2002 A dynamic model, including contact bounce, of an electrostatically actuated microswitch J. Microelectromech. Syst. 11 276-83
23. Lumbantobing A, Kogut L and Komvopoulos K 2004 Electrical contact resistance as a diagnostic tool for MEMS contact interfaces J. Microelectromech. Syst. 13 977-87
24. Pandey A K and Pratap R 2004 Coupled nonlinear effects of surface roughness and rarefaction on squeeze film damping in MEMS structures J. Micromech. Microeng. 14 1430-7
25. Majumdar A and Tien C L 1991 Fractal network model for contact conductance J. Heat Transf. 113 516-25
26. Greenwood J A and Williamson J B P 1966 Contact of nominally flat surfaces Proc. R. Soc. Lond. A 295 300-19
27. Hudlet S, Saint Jean M, Guthmann C and Berger J 1998 Evaluation of the capacitive force between an atomic force microscopy tip and a metallic surface Eur. Phys. J. B 2 5-10
28. Greason W D 1999 Idealized model for charged device electrostatic discharge IEEE Trans. Indust. Appl. 35 240-58
29. Boyer L, Houzé F, Tonck A, Loubet J-L and Georges J-M 1994 The influence of surface-roughness on the capacitance between a sphere and a plane J. Phys. D: Appl. Phys. 27 1504-8
30. Komvopoulos K 1996 Surface engineering and microtribology for microelectromechanical systems Wear 200 305-27
31. Goldsmith C, Ehmke J, Malczewski A, Pillans B, Eshelman S, Yao Z, Brank J and Eberly M 2001 Lifetime characterization of capacitive RF MEMS switches in Proc. IEEE MTT-S 2001 Int. Microwave Symp. Digest vol 1 pp 227-30
32. Williams D W and Williams W T 1972 Effect of electrode surface finish on electrical breakdown in vacuum J. Phys. D: Appl. Phys. 5 1845-54
33. Ono T, Sim D Y and Esashi M 2000 Micro-discharge and electric breakdown in a micro-gap J. Micromech. Microeng. 10 445-51
34. Muller V M, Derjaguin B V and Toporov Y P 1983 On two methods of calculation of the force of sticking of an elastic sphere to a rigid plane Colloid Surf. 7 251-9
35. Suh A Y and Polycarpou A A 2003 Adhesion and pull-off forces for polysilicon MEMS surfaces using the sub-boundary lubrication model J. Tribol. 125 193-9