Electrostatic deflections of volume constrained MEMS

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 76-80

  Pelesko, J A ^a   Goldsztein, G ^b  

^a UNIVERSITY OF DELAWARE   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Biomembranes; Electrodes; Electrostatics; Laplace equations; Mathematical model; Mathematics; Microfluidics; Micromechanical devices; Nanoelectromechanical systems; Voltage

Indexed keywords

DROP BREAKUP; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; LAPLACE EQUATION; MATHEMATICAL MODELS; MATHEMATICAL TECHNIQUES; MICROFLUIDICS; NEMS;

BIOMEMBRANES; CONSTRAINED SYSTEMS; ELASTIC INTERACTIONS; ELECTROSTATIC DEFLECTION; MEMBRANE DEFLECTIONS; MICRO FLUIDIC SYSTEM; MICROMECHANICAL DEVICE; STATIC ELECTRIC FIELDS;

ELECTROSTATIC FORCE;

EID: 33745057301     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221968     Document Type: Conference Paper

References (5)

1. D. Bernstein, P. Guidotti and J.A. Pelesko, Analytical and Numerical Analysis of Electrostatically Actuated MEMS Devices, Proc. MSM 2000, pp. 509-512.
2. Cho, S.K., Moon, H., and Kim, C.J. (2003). Creating, Transporting, Cutting, and Merging Liquid Droplets by Electrowetting-Based Actuation for Digital Microfluidic Circuits, J. MEMS, 12, pp. 70-80.
3. G. Flores, G.A. Mercado Sanchez, and J.A. Pelesko, Dynamics and Touchdown in Electrostatic MEMS, in preparation.
4. H.C. Nathanson, W.E. Newell, R.A. Wickstrom and J.R. Davis, The Resonant Gate Transistor, IEEE Trans. on Electron Devices, 14 (1967), pp. 117-133.
5. Pelesko, J.A. and Bernstein, D.H. , Modeling MEMS and NEMS, Chapman Hall and CRC Press, 2002.