Conductive silicone based MEMS sensor and actuator

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1406-1411

  Huang, Adam ^a   Wong, Victor Tak Sing ^a   Ho, Chih Ming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Accelerometer; Carbon black; Silicone patterning; Valves

Indexed keywords

BULK MICROMACHINING TECHNOLOGIES; CONDUCTIVE SILICONE; FLUIDIC VALVES; SILICONE PATTERNING;

ACCELEROMETERS; ACTUATORS; CARBON BLACK; FLUIDIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYMERS; SENSORS; VALVES (MECHANICAL);

SILICONES;

EID: 27544445438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497345     Document Type: Conference Paper

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