Electrostatic effects in micromachined actuators for adaptive optics

Journal of Electrostatics

Volumn 42, Issue 1-2, 1997, Pages 69-81

  Horenstein, Mark N ^a   Bifano, Thomas G ^b   Mali, Raji Krishnamoorthy ^b   Vandelli, Nelsimar ^b  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; CHARGE TRANSFER; ELECTRIC CHARGE; ELECTROSTATICS; MEMBRANES; MICROMACHINING; SEMICONDUCTING SILICON; SUBSTRATES;

ELECTROMECHANICAL INSTABILITY;

ACTUATORS;

EID: 0031251391     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(97)00138-1     Document Type: Article

References (7)

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4. P. Osterberg, H.Yie, X. Cai, J. White, S. Senturia, "Self Consistent Simulation and Modeling of Electrostatically Deformed Diaphragms", Proc. MEMS '94, Oiso, Japan, Jan '94
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6. D. Maier-Schneider, J. Maibach, E. Obermeier, "A New Analytical Solution for the Load Deflection of Square Membranes", Jour. Microelectromechanical Systems, 4 (4), Dec. 1995.
7. M.A. Michalicek, V.M Bright, and J.H. Comtois, "Design, Fabrication, Modeling, and Testing of a Surface-Micromachined Micromirror Device", Proc. of the ASME: Dynamic Systems and Control Division, DSC 57-2,1995.