On the electromechanical modelling of a resonating nano-cantilever-based transducer

Ultramicroscopy

Volumn 100, Issue 3-4, 2004, Pages 225-232

  Teva, J ^a   Abadal, G ^a   Davis, Z J ^b   Verd, J ^a   Borrise X ^c   Boisen, A ^b   Perez Murano F ^c   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

07.10.Cm; 18,32,47; 77.65.Fs; 83.85.Gk; 85.40.Ux; Cantilever based sensors; Electromechanical model; NEMS; Resonance frequency

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; ELECTROMECHANICAL DEVICES; ELECTROSTATICS; FREQUENCY RESPONSE; POLARIZATION; VIBRATIONS (MECHANICAL);

ELECTROMECHANICAL MODELING; OPTICAL MICROSCOPES; OSCILLATION AMPLITUDES;

TRANSDUCERS;

ALTERNATING CURRENT; AMPLITUDE MODULATION; CONFERENCE PAPER; DIRECT CURRENT; ELECTRIC ACTIVITY; ELECTRIC CAPACITANCE; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; ELECTRODE; MICROSCOPE; MICROSCOPY; MODEL; MOLECULAR MECHANICS; NANOTECHNOLOGY; OSCILLATION; POLARIZATION; TRANSDUCER; VALIDATION PROCESS;

EID: 3042604507     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2003.12.013     Document Type: Conference Paper

References (19)

1. Berger R., Gerber Ch., Lang H.P. J. K. Gimzewski. Microelectronic Eng. 35:1997;373
2. Abadal G., Davis Z.J., Helbo B., Borrisé X., Ruiz R., Boisen A., Campabadal F., Esteve J., Figueras E., Pérez-Murano F. N. Barniol. Nanotechnology. 12:2001;100
3. http://www.uab.es/nanomass
4. J.R. Gilbert, R. Legtenberg, S.D. Senturia, Proceedings of the IEEE Conference on Micro Electro Mechanical Systems, Amterdam, The Netherlands, January 30-February 2, 1995.
5. M.W. Putty, Polysilicon resonant microstructures, M.S. Thesis, University of Michigan at Ann Arbor, 1988.
6. Abadal G., Davis Z.J., Borrisé X., Hansen O., Boisen A., Barniol N., Pérez-Murano F., Serra F. Ultramicroscopy. 97:2003;127
7. Dror Sarid, Scanning Force Microscopy, Oxford University Press, Oxford, 1991, ISBN 0-19-509204-X.
8. A.D. Dimarogonas, S. Haddad, Vibration for Engineers, 1st Edition, Prentice Hall, Englewood Clifts, NJ, 1992, ISBN 0-13-952680-3.
9. Q. Jing, T. Mukherjee, G.K. Fedder, Large deflection beam model for schematic based behavioral simulation in NODAS, Technical Proceedings of 2002 International Conference on Modeling and Simulation of Microsystems, San Juan (Puerto Rico), NanoTech 2002 - MSM 2002.
10. http://bsac.berkeley.edu/cadtools/sugar/sugar
11. T. Sakurai, K. Tamaru, IEEE Trans. Electron Dev. ED-30 2 (1983) 183.
12. J.H. Mathews, K. Fink, Numerical Methods Using MATLAB, 3rd Edition, Prentice Hall, Englewood/clifts, NJ, 1999, ISBN:0-13-270042-5.
13. Davis Z.J., Abadal G., Khun O., Hansen O., Grey F. A. Boisen. J. Vac. Sci. Technol B. 18(2):2000;612
14. O. Madelung, M. Schulz, W. Dieze, H. Weiss, Landolt-Börstein III7/17c, Springer, Berlin, 1985.
15. Gray D.E. American Institute of Physics Handbook. 3rd Edition:1982;McGraw-Hill, New York
16. Obermeier E. Mater. Res. Soc. Symp. Proc. 444:1997;39
17. Ding X., Ko WH., Mansour JM. Sensors and Actuators A. 21-23:1990;866
18. Lee C.S., Lee J.H., Choi C.A., No K., Wee D.M. J. Micromech. Microeng. 9:1999;252
19. Harvey C., William N.E., Newell R.A., Wickstrom J.R.D. IEEE Trans. Electron Dev. 14(3):1967;117