Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 570-583

  Guerre, R ^a   Hibert, C ^a   Burri, Y ^a   Fluckiger Ph ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

DRIE; Micromirrors; Optical MEMS; Optical switches

Indexed keywords

ACTUATORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SILICON WAFERS;

MECHANICAL RESONANCE BEHAVIOR; MEMS; NON-LINEARITY; OPTICAL WAVEGUIDE WAFERS;

MIRRORS;

EID: 24944450965     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.02.039     Document Type: Conference Paper

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