Movable vertical mirror arrays for optical microswitch matrixes and their electromagnetic actuation

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 58-63

  Houlet, Lionel ^b   Helin, Philippe ^c   Bourouina, Tarik ^a,d   Reyne, Gilbert ^e   Dufour Gergam, Elisabeth ^f   Fujita, Hiroyuki ^b  

^a IEEE

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c Egypt   (France)

^d Ecole Superieure d'Ingenieurs en   (France)

^e ENSIEG   (France)

^f UNIV PARIS SUD   (France)

Author keywords

Deep RIE; Electromagnetic actuation; Ferromagnetic materials; KOH etching; Optical microswitches; SU8 mould

Indexed keywords

ARRAYS; FERROMAGNETIC MATERIALS; MATRIX ALGEBRA; MIRRORS; OPTICAL DESIGN; OPTICAL FIBERS; REACTIVE ION ETCHING;

ELECTROMAGNETIC ACTUATION;

OPTICAL SWITCHES;

EID: 0036248651     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991399     Document Type: Article

References (6)

1. Self-aligned micromachining process for large-scale, free-space optical cross-connects
2. Electromagnetic torsion mirrors for self-aligned fiber optic cross-connectors by silicon micromachining
3. Micro-opto-mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
4. Self-aligned vertical mirror and V-grooves applied to an optical switch: Modeling and optimization of bi-stable operation by electromagnetic actuation