Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 418-423

  Togo, H ^a   Sato, M ^a   Shimokawa, F ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FLOW; CRUDE PETROLEUM; MICROELECTROMECHANICAL DEVICES;

MULTIELEMENT THERMO-CAPILLARY OPTICAL SWITCHES;

OPTICAL SWITCHES;

EID: 0032666298     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746865     Document Type: Conference Paper

References (5)