Micromachined curling optical switch array for PLC-based, integrated programmable add/drop multiplexer

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 54, Issue 3, 2001, Pages

  Katayama, M ^a   Kanie, T ^a   Okuyama, H ^a   Sano, T ^a   Koyama, K ^a   Sasaki, T ^a   Hirose, C ^a   Hattori, T ^a   Nishimura, M ^a   Semura, S ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; FIBER OPTIC NETWORKS; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; OPTICAL WAVEGUIDES;

MICROSTRUCTURE DEVICES; MICROSTRUCTURE FABRICATION; MULTIPLEXER; PLANAR LIGHTWAVE CIRCUIT;

OPTICAL SWITCHES;

EID: 0034834894     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Vertical mirrors fabricated by reactive ion etching for fiber optical switching
2. Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication
3. Compact optical cross-connect swtch based on total internal reflection in a fluid-containing planar lightwave circuit
4. Strictly non-blocking N × N thermo-capillarity optical matrix switch using silica-based waveguide
5. Out-of-plane microstructures using stress engineering of thin films
6. A low voltage micromachined optical switch by stress-induced bending
7. Electrostatic curved electrode actuators
8. Cmos drivable electrostatic microactuator with large deflection