A micromachined optical switch with a vertical SU-8 mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 354-359

  Liu, Suyan ^a   Bu, Minqiang ^a   Ye, Xiongying ^a   Zhou, Zhaoying ^a   Zhang, Dacheng ^b   Li, Ting ^b   Hao, Yilong ^b   Tan, Zhimin ^b  

^a TSINGHUA UNIVERSITY   (China)

^b PEKING UNIVERSITY   (China)

Author keywords

MEMS; Optical switch; SU 8; Surface micromachined; Vertical mirror

Indexed keywords

COMPUTER SIMULATION; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; MULTIMODE FIBERS; POLYSILICON; SILICON NITRIDE; SURFACE ROUGHNESS;

VERTICAL MIRRORS;

OPTICAL SWITCHES;

EID: 0035771322     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.444734     Document Type: Article

References (6)

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