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Volumn 87, Issue 3, 2001, Pages 172-178

Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALLINE MATERIALS; ELECTRIC CURRENTS; ELECTRIC WINDINGS; FINITE ELEMENT METHOD; MAGNETIC CIRCUITS; MICROMACHINING; MIRRORS; OPTIMIZATION; PERMANENT MAGNETS; SILICON;

EID: 0035124784     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00473-8     Document Type: Article
Times cited : (41)

References (7)
  • 2
    • 0032804851 scopus 로고    scopus 로고
    • Free-space fiber-optic switches based on MEMS vertical torsion mirrors
    • Lee S.S., Huang L.S., Kim C.J., Wu M. Free-space fiber-optic switches based on MEMS vertical torsion mirrors. J. Lightwave Technol. 17(1):1999;7-13.
    • (1999) J. Lightwave Technol. , vol.17 , Issue.1 , pp. 7-13
    • Lee, S.S.1    Huang, L.S.2    Kim, C.J.3    Wu, M.4
  • 3
    • 0030407468 scopus 로고    scopus 로고
    • Electrostatic micro-torsion mirrors for an optical matrix switch
    • Toshiyoshi H., Fujita H. Electrostatic micro-torsion mirrors for an optical matrix switch. IEEE J. MEMS. 5(4):1996;231-237.
    • (1996) IEEE J. MEMS , vol.5 , Issue.4 , pp. 231-237
    • Toshiyoshi, H.1    Fujita, H.2
  • 4
    • 3643105252 scopus 로고    scopus 로고
    • Free-space micromachined optical switches with sub-millisecond switching time for large-scale optical cross-connects
    • Lin L., Goldstein E., Tkach R. Free-space micromachined optical switches with sub-millisecond switching time for large-scale optical cross-connects. IEEE Photonics Technol. Lett. 10(4):1998;525-527.
    • (1998) IEEE Photonics Technol. Lett. , vol.10 , Issue.4 , pp. 525-527
    • Lin, L.1    Goldstein, E.2    Tkach, R.3
  • 5
    • 0033724551 scopus 로고    scopus 로고
    • Self-aligned vertical mirrors and V-grooves applied to a self-latching matrix switch for optical networks
    • 23-27 January Miyazaki, Jpn.
    • P. Helin, M. Mita, H. Fujita, Self-aligned vertical mirrors and V-grooves applied to a self-latching matrix switch for optical networks, IEEE MEMS 2000, 23-27 January 2000, Miyazaki, Jpn., pp. 467-472.
    • (2000) IEEE MEMS 2000 , pp. 467-472
    • Helin, P.1    Mita, M.2    Fujita, H.3
  • 6
    • 0028407612 scopus 로고
    • Micromachined optical planes and reflectors in silicon
    • Rosengren L., Smith L., Backlund Y. Micromachined optical planes and reflectors in silicon. Sensors and Actuators. A41/42:1994;330-333.
    • (1994) Sensors and Actuators , vol.4142 , pp. 330-333
    • Rosengren, L.1    Smith, L.2    Backlund, Y.3
  • 7
    • 0031167434 scopus 로고    scopus 로고
    • Fabrication of a new highly symmetrical, in plane accelerometer structure by anisotropic etching of (1 0 0) silicon
    • Schropfer G., Ballandras S., de Labachellerie M., Blind P., Ansel Y. Fabrication of a new highly symmetrical, in plane accelerometer structure by anisotropic etching of (1. 0 0) silicon J. Micromech. Microeng. 7:1997;71-78.
    • (1997) J. Micromech. Microeng. , vol.7 , pp. 71-78
    • Schropfer, G.1    Ballandras, S.2    De Labachellerie, M.3    Blind, P.4    Ansel, Y.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.