Silicon micro optical switching device with an electromagnetically operated cantilever

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 220-224

  Matsuura, Tsukasa ^a   Fukami, Tatsuya ^a   Chabloz, Martial ^a   Sakai, Yuichi ^a   Izuo, Shin Ichi ^a   Uemura, Aritomo ^a   Kaneko, Shin Ichi ^a   Tsutsumi, Kazuhiko ^a   Hamanaka, Koichi ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b CHITOSE INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CROSSTALK; INSERTION LOSSES; LIGHT REFLECTION; MAGNETIC FILMS; MICROMACHINING; MIRRORS; OPTICAL SWITCHES; SILICON WAFERS; SURFACE ROUGHNESS;

ELECTROMAGNETICALLY OPERATED CANTILEVERS; FIBER ARRAY MODULES; SILICON MICRO-OPTICAL SWITCHING DEVICES;

MICROACTUATORS;

EID: 0033733841     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00387-8     Document Type: Article

References (4)

1. Lee S.S., Motamedi E., Wu M.C. Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems. Transducers '97, Digest of Technical Papers. 1:1997;85-88.
2. Miller R.A., Tai Y.C., Xu G., Bartha J., Lin F. An electromagnetic MEMS 2×2 fiber optic bypass switch. Transducers '97, Digest of Technical Papers. 1:1997;89-92.
3. Marxer C., de Rooij N.F. Silicon micromechanics for the fiber-optic information highway. Sens. Mater. 10(6):1998;351-362.
4. Licensed from Robert Bosch, patent number 5501893, issued March 26, 1996.