Electrostatically actuated micro-fluidic optical cross-connect switch

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 47-48

  Ollier, E ^a   Divoux, C ^a   Margail, J ^a   Enot, T ^a   Ortiz, L ^a   Gobil, Y ^a   Salhi, M ^a   Berruyer, P ^a   Gliere A ^a   Bontemps, A ^a   Laporte, M ^b   Bruel, M ^b  

^a CEA LETI   (France)

^b OPSITECH   (France)

Author keywords

Assembly; Displacement control; Electrostatic actuators; Energy consumption; Micromechanical devices; Motion control; Optical device fabrication; Optical devices; Optical switches; Programmable control

Indexed keywords

ACTUATORS; ASSEMBLY; DISPLACEMENT CONTROL; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATICS; ENERGY UTILIZATION; MECHANICAL ACTUATORS; MOEMS; MOTION CONTROL; OPTICAL DEVICES; TELECOMMUNICATION NETWORKS;

LOW-POWER CONSUMPTION; MECHANICAL BEHAVIOUR; MICROMECHANICAL DEVICE; OPTICAL CROSS CONNECT SWITCHES; OPTICAL DEVICE FABRICATION; PROGRAMMABLE CONTROLS; RELEASE PROCESS; TECHNOLOGICAL DEVELOPMENT;

OPTICAL SWITCHES;

EID: 8844228632     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233460     Document Type: Conference Paper

References (2)

1. "Compact optical cross-connect switch based on total internal reflection in a fluid-containing planar circuit", J.E. Fouquet, OFC 2000, Baltimore (US), March 7-10, 2000
2. "Micromechanical optical switches based on thermocapillarity integrated in waveguide substrate", M. Makihara, Journal of Lightwave technology, Vol 17, N 1, January 1999