Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 3, 2002, Pages 1118-1125

  Huang, S M ^a   Hong, M H ^a   Luk'yanchuk, B S ^a   Lu, Y F ^a   Song, W D ^a   Chong, T C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DOPING (ADDITIVES); GOLD; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SURFACES; THERMAL EXPANSION;

NANOPATTERNING;

LASER PULSES;

EID: 0035998554     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1481865     Document Type: Conference Paper

References (24)