NANOJET: Nanostructuring via a downstream plasmajet

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2764-2767

  Voigt, J ^a   Reinker, B ^a   Rangelow, I W ^a   Mariotto, G ^b   Shvets, I ^b   Guethner, P ^c   Loschner H ^d  

^a UNIVERSITY OF KASSEL   (Germany)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c Omicron Vakuumphysik GmbH   (Germany)

^d IMS Ion Microfabrication Systems   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033259662     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591060     Document Type: Article

References (7)

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