Nanofabrication with scanning nanonozzle 'Nanojet'

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 1035-1042

  Voigt, J ^a   Shi, F ^a,d   Edinger, K ^b   Guthner P ^c   Rangelow, I W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b UNIVERSITY OF MARYLAND   (United States)

^c Omicron Vakuumphysik GmbH   (Germany)

^d INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Downstream plasma; Nanofabrication; Nozzle; Radical jet; Scanning probe microscopy

Indexed keywords

ETCHING; FREE RADICALS; ION BOMBARDMENT; MICROSCOPIC EXAMINATION; NOZZLES; PLASMA APPLICATIONS; SUBSTRATES;

PLASMA DISCHARGES;

NANOTECHNOLOGY;

EID: 0035450659     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00447-6     Document Type: Article

References (9)