Maskless nanofabrication using the electrostatic attachment of gold particles to electrically patterned surfaces

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 671-674

  Mesquida, Patrick ^a   Stemmer, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Maskless microfabrication; Metal deposition; Nanofabrication; Nanostructure; Particle attachment

Indexed keywords

ATOMIC FORCE MICROSCOPY; COLLOIDS; ELECTRIC FIELD EFFECTS; FABRICATION; GOLD; NANOSTRUCTURED MATERIALS; SUSPENSIONS (FLUIDS); THIN FILMS;

MASKLESS NANOFABRICATION;

NANOTECHNOLOGY;

EID: 0036643791     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00441-0     Document Type: Conference Paper

References (6)

1. Attaching silica nanoparticles from suspension onto surface charge patterns generated by a conductive atomic force microscopy tip
2. Measuring and modifying the electric surface potential distribution on a nanometre scale: A powerful tool in science and technology
3. Resolution and contrast in Kelvin probe force microscopy
4. Kelvin probe force microscopy of molecular surfaces
5. Preparation, comparison and performance of hydrophobic AFM tips
6. Well-size-controlled colloidal gold nanoparticles dispersed in organic solvents