High speed patterning of a metal silicide using scanned probe lithography

Applied Physics Letters

Volumn 75, Issue 10, 1999, Pages 1476-1478

  Snow, E S ^a   Campbell, P M ^a   Perkins, F K ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000460993     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124730     Document Type: Article

References (18)

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