Charge writing on the nanometre scale in a fluorocarbon film

Surface and Interface Analysis

Volumn 33, Issue 2, 2002, Pages 159-162

  Mesquida, P ^a   Knapp, H F ^a   Stemmer, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

AFM; Charge writing; Data storage; Electret; KFM; Trapped surface charges

Indexed keywords

CHARGE CARRIERS; DATA STORAGE EQUIPMENT; ELECTRETS; ELECTRIC CONDUCTIVITY; FLUOROCARBONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

CHARGE WRITING; KELVIN PROBE FORCE MICROSCOPY; NANOMETRE-SCALE CHARGE PATTERNS; OPTIMAL CHARGE STORAGE PROPERTIES;

ATOMIC FORCE MICROSCOPY;

EID: 0036471272     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1181     Document Type: Article

References (10)