Investigation of radical-surface reactions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2727-2731

  Voigt, J ^a   Rangelow, I W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLOW OF FLUIDS; JETS; MOLECULAR STRUCTURE; ORGANIC POLYMERS; PLASMAS; PYROLYSIS; REACTION KINETICS; SILICON; SUBSTRATES; SURFACE REACTIONS; TRANSPORT PROPERTIES;

DOWNSTREAM GAS FLOW; FLUORINE RADICALS; NANOJET SETUP; RADICAL CONTAINING DOWNSTREAM PLASMA; TRANSPORT OF FREE RADICALS;

FREE RADICALS;

EID: 0035519470     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1414014     Document Type: Article

References (8)

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4. J. Voigt, Ph.D. thesis, University of Kassel, Gemany, 2001.
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