Parallel nanolithography in carbon layers with conductive imprint stamps

Applied Physics Letters

Volumn 76, Issue 6, 2000, Pages 786-788

  Mühl, Thomas ^a   Kretz, Johannes ^a   Mönch, Ingolf ^a   Schneider, Claus M ^a   Brückl, Hubert ^b   Reiss, Günter ^b  

^a IFW DRESDEN   (Germany)

^b BIELEFELD UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242426295     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125895     Document Type: Article

References (9)

1. K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschmidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
2. K. Kragler, E. Günther, R. Leuschner. G. Falk, H. von Seggern, and G. Saemann-Ischenko, J. Vac. Sci. Technol. B 14, 1327 (1996).
3. T. Mühl, H. Brückl, G. Weise, and G. Reiss, J. Appl. Phys. 82, 5255 (1997).
4. T. Mühl, H. Brückl, D. Kraut, J. Kretz, I. Mönch, and G. Reiss, J. Vac. Sci. Technol. B 16, 3879 (1998).
5. S. C. Eagle and G. K. Fedder, Appl. Phys. Lett. 74, 3902 (1999).
6. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
7. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Technol. B 14, 4129 (1996).
8. P. R. Krauss and S. Y. Chou, Appl. Phys. Lett. 71, 3174 (1997).
9. N. Miura, H. Ishii, J. Shirakashi, A. Yamada, and M. Konagai, Appl. Surf. Sci. 113/114, 269 (1997).