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Advanced Materials

Volumn 11, Issue 17, 1999, Pages 1473-1475

Plowing on the sub-50 nm scale: Nanolithography using scanning force microscopy

(2) Kunze, Ulrich a Klehn, Bernd a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000415213 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/(SICI)1521-4095(199912)11:17<1473::AID-ADMA1473>3.0.CO;2-H Document Type: Article

Times cited : (54)

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