Multiscale simulation of loading and electrical resistance in silicon nanoindentation

Physical Review Letters

Volumn 84, Issue 6, 2000, Pages 1260-1263

  Smith, G S ^a   Tadmor, E B ^a,b   Kaxiras, Efthimios ^a  

^a HARVARD UNIVERSITY   (United States)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000185933     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.84.1260     Document Type: Article

References (19)

1. Li xiadong and B. Bhushan, Thin Solid Films 340, 210 (1999)
2. W. C. Oliver and C. J. McHargue, Thin Solid Films 161, 117 (1988).
3. D. R. Clarke, M. C. Kroll, P. D. Kirchner, R. F. Cook, and B. J. Hockey, Phys. Rev. Lett. 60, 2156 (1988).
4. G. M. Pharr, W. C. Oliver, and D. R. Clarke, J. Electron. Mater. 19, 881 (1990).
5. G. M. Pharr, W. C. Oliver, R. F. Cook, P. D. Kirchner, M. C. Kroll, T. R. Dinger, and D. R. Clarke, J. Mater. Res. 7, 961 (1992).
6. E. R. Weppelmann, J. S. Field, and M. V. Swain, J. Mater. Res. 8, 830 (1993).
7. E. R. Weppelmann, J. S. Field, and M. V. Swain, J. Mater. Sci. 30, 2455 (1995).
8. A. Kailer, Y. G. Gogotsi, and K. G. Nickel, J. Appl. Phys. 81, 3057 (1997).
9. J. S. Kallman, W. G. Hoover, C. G. Hoover, A. J. De Groot, S. M. Lee, and F. Wooten, Phys. Rev. B 47, 7705 (1993)
10. R. Pèrez, M. C. Payne, and A. D. Simpson, Phys. Rev. Lett. 75, 4748 (1995).
11. A. K. Bhattacharya and W. D. Nix, Int. J. Solids Struct. 24, 881 (1988)
12. J. A. Knapp, D. M. Follstaedt, S. M. Myers, J. C. Barbour, and T. A. Friedmann, J. Appl. Phys. 85, 1460 (1999).
13. E. B. Tadmor, M. Ortiz, and R. Phillips, Philos. Mag. A 73, 1529 (1996).
14. E. B. Tadmor, G. S. Smith, N. Bernstein, and E. Kaxiras, Phys. Rev. B 59, 235 (1999).
15. F. H. Stillinger and T. A. Weber, Phys. Rev. B, 31, 5262 (1985).
16. C. L. Kelchner, S. J. Plimpton, and J. C. Hamilton, Phys. Rev. B, 58, 11085 (1998).
17. H. Hertz, J. Reine angewandte Mathematik 92, 156 (1882).
18. L. L. Boyer, E. Kaxiras, J. L. Feldman, J. Q. Broughton, and M. J. Mehl, Phys. Rev. Lett 67, 715 (1991).
19. R. Holm, Electric Contacts: Theory and Application (Springer-Verlag, New York, 1967).