Metal pattern fabrication using the local electric field of a conducting atomic force microscope probe

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1455-1459

  Brandow, Susan L ^a   Calvert, Jeffrey M ^a   Snow, Eric S ^a   Campbell, Paul M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; AFM; AMBIENT CONDITIONS; ATOMIC FORCE MICROSCOPES; BINDING SELECTIVITY; ELECTROLESS; LOCAL ELECTRIC FIELD; METAL PATTERNS; NEGATIVE TONES; NI FILMS; ORGANOSILANES; OXIDE PATTERNS; PATTERN TRANSFERS; SELECTIVE DEPOSITION; SURFACE CHEMICAL REACTIVITY; UNEXPOSED REGIONS;

ELECTRIC FIELDS; PALLADIUM; PALLADIUM COMPOUNDS;

REACTIVE ION ETCHING;

EID: 0002070074     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580561     Document Type: Article

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