Thermal issues in MEMS and microscale systems

IEEE Transactions on Components and Packaging Technologies

Volumn 25, Issue 4, 2002, Pages 576-583

  DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Microfluidics; Microhotplates; Thermal actuation

Indexed keywords

CHEMICAL SENSORS; FLUIDICS; MICROMACHINING; SILICON; SINGLE CRYSTALS;

ELECTROTHERMAL MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037002451     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2003.809110     Document Type: Conference Paper

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