A novel thermally-actuated silicon micropump

MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1997, Pages 231-234

  Zou, J ^a   Ye, X Y ^a   Zhou, Z Y ^a   Yang, Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; SILICON;

AIR CHAMBERS; ALUMINUM MEMBRANES; BIMETALLICS; MICRO PUMP; PNEUMATIC ACTUATION; SILICON MEMBRANES; SILICON MICROPUMPS; THERMAL; THERMAL ACTUATION; THERMAL DYNAMICS;

PNEUMATICS;

EID: 0013445574     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1997.768885     Document Type: Conference Paper

References (5)

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2. Y. Yang A Thermally Actuated Micropump The 8th International Conference on Solid-State Sensors and Actuators The 8th International Conference on Solid-State Sensors and Actuators Stockholm Sweden 1995-June-25-29
3. M. Carmona Dynamic Simulations of Micropumps J. Micromech. Microeng. 6 128 130 1996
4. T. Bourouina Modeling Micropumps with Electrical Equivalent Networks J. Micromech. Microeng. 6 398 404 1996
5. ALGOR FEAS(Super SAP 91') Users' Manual 9 1991