A BIMETALLIC THERMALLY ACTUATED MICROPUMP

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1996-U, Issue , 1996, Pages 351-354

  Yang, Yue ^a   Zhou, Zhaoying ^a   Ye, Xiongying ^a   Jiang, Xiaoning ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GAS TURBINES;

BIMETALLICS; CHECK VALVES; DRIVING VOLTAGES; FLOW CHARACTERISTIC; MAXIMUM FLOW RATE; MICRO PUMP; MICRO VALVES; MICROMACHINING TECHNIQUES; PUMP CHAMBERS; SILICON MICROMACHINING;

PUMPS;

EID: 79959767770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1996-1373     Document Type: Conference Paper

References (6)

1. Yang Yue, Zhou Zhaoying, Ye Xiongying, Li Yong, 1995, “A Thermally actuated micropump”. Transducers'95 • Eurosensors IX, Late News Contributions, pp.81-82.
2. Jiang Xiaoning, Zhou Zhaoying, Li Yong, 1995, “Microfluid flow in micorchannel”. Digest of Technical Papers on Transducers'95 ■ Eurosensors EX Vol.2, pp.317-320.
3. Nakagawa S., Shoij S., Esashi M., 1990, “A micro chemical analyzing system integrated on a silicon wafer”, IEEE-MEMS, pp.203-206.
4. Zengerle R., Richter A., Sandmaier H., 1992, “A micro membrane pump with electrostatic actuation”, Proc. IEEE MEMS, pp. 19-24.
5. van de Pol F.C.M., van Lintel H.T.G., Elwenspoek M., 1990, “A thermopneumatic micropump based on micro-engineering techniques”, Sensors & Actuators, Vol. A21-A23, pp. 193-197.
6. J.Jermam, “Electrically-activated micromachined diaphragm valves”, Technical Digest of IEEE Solid-State Sensors and Actuators Workshop, 1990, pp.65-69.