Production-ready silicon microvalve

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 227-237

  Wang, T K ^a   Barth, Phil ^a   Alley, Rod ^a   Baker, Jim ^a   Yates, Dave ^a   Field, Leslie ^a   Gordon, Gary ^a   Beatty, Chris ^a   Tully, Lori ^a  

^a Little Falls Analytical Div ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIMETALS; COST EFFECTIVENESS; GAS CHROMATOGRAPHY; MICROMACHINING; RELIABILITY; SILICON; VALVES (MECHANICAL);

CHEMICAL ANALYSIS SYSTEMS; MICROMACHINED GAS CONTROL VALVE; MINIATURIZATION; SILICON MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033311047     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)