An electro-thermally and laterally driven polysilicon microactuator

Journal of Micromechanics and Microengineering

Volumn 7, Issue 1, 1997, Pages 7-13

  Pan, Chi Shiang ^a   Hsu, Wensyang ^b  

^a NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; GRIPPERS; MICROELECTROMECHANICAL DEVICES; SILICON SENSORS; THERMAL EXPANSION;

ELECTRO THERMALLY DRIVEN MICROACTUATOR; LATERALLY DRIVEN MICROACTUATOR; POLYSILICON MICROACTUATOR;

ACTUATORS;

EID: 0031095336     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/1/003     Document Type: Article

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