Compliant thermal microactuators

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 463-469

  Jonsmann, Jacques ^a   Sigmund, Ole ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ELECTROPLATING; IMAGE ANALYSIS; LINEAR PROGRAMMING; MICROMACHINING; OPTIMIZATION; RAPID PROTOTYPING; REACTIVE ION ETCHING; THERMAL EXPANSION; TOPOLOGY;

COMPLIANT THERMAL MICROACTUATORS; THERMAL EXPANSION COEFFICIENT; TOPOLOGY OPTIMIZATION;

MICROACTUATORS;

EID: 0343496789     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00011-4     Document Type: Article

References (3)

1. Larsen U.D., Sigmund O., Bouwstra S. Design and fabrication of compliant mechanisms and material structures with negative Poisson's ratio. J. MEMS. 6:1997;99-106.
2. Sigmund O. Systematic design of microactuators using topology optimization. SPIE Proc. 3328:1998;23-31.
3. Müllenborn M., Heschel M., Larsen U.D., Dirac H., Bouwstra S. Laser direct etching of silicon on oxide for rapid prototyping. J. Micromech. Microeng. 6:1996;49-51.