Hexsil tweezers for teleoperated micro-assembly

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 72-77

  Keller, C G ^a   Howe, R T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; DOPING (ADDITIVES); FORCE CONTROL; POLYCRYSTALLINE MATERIALS; SILICON; STRAIN GAGES; THERMAL EXPANSION;

HEXSIL TWEEZERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030697635     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)