Analysis and design of electrothermal actuators fabricated from single crystal silicon

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 233-240

  Maloney, John M ^a   DeVoe, Don L ^a   Schreiber, David S ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MONOCRYSTALLINE SILICON; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

DEEP REACTIVE ION ETCHING; DEEP REACTIVE-ION ETCHINGS; ELECTRO-THERMAL ACTUATORS; POLYSILICON DEVICES; RESISTIVE HEATING; SILICON ON INSULATOR WAFERS; SILICONON-INSULATOR TECHNOLOGY (SOI); SINGLE CRYSTAL SILICON; THERMAL ACTUATOR; V-BEAM ACTUATOR;

FABRICATION;

EID: 84921463504     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1097     Document Type: Conference Paper

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