Electrothermal linear micromotors fabricated from deep reactive ion etching of single crystal silicon

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2863-2870

  Maloney, John M ^a   Schreiber, David S ^a   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTROSTATICS; FRICTION; LINEAR MOTORS; POLYSILICON; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

DEEP REACTIVE ION ETCHING (DRIE); ELECTROTHERMAL MOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542726114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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