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Volumn 2, Issue , 2001, Pages 2863-2870

Electrothermal linear micromotors fabricated from deep reactive ion etching of single crystal silicon

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTROSTATICS; FRICTION; LINEAR MOTORS; POLYSILICON; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

EID: 1542726114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (14)
  • 4
    • 0033733840 scopus 로고    scopus 로고
    • Low voltage electrothermal vibromotor for silicon optical bench applications
    • Pai, M, and Tien, N. C., 2000, "Low voltage electrothermal vibromotor for silicon optical bench applications," Sensors and Actuators, 83: 237-243.
    • (2000) Sensors and Actuators , vol.83 , pp. 237-243
    • Pai, M.1    Tien, N.C.2
  • 5
    • 0042638073 scopus 로고    scopus 로고
    • Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon
    • Comtois, J. H., Michalicek, M. A., and Barron, C. C., 1998, "Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon," Sensors and Actuators, A70: 23-31.
    • (1998) Sensors and Actuators , vol.A70 , pp. 23-31
    • Comtois, J.H.1    Michalicek, M.A.2    Barron, C.C.3
  • 6
    • 84921463504 scopus 로고    scopus 로고
    • Analysis and design of electrothermal actuators fabricated from single crystal silicon
    • Orlando, FL
    • Maloney, J. M., DeVoe, D. L., and Schreiber, D. S., 2000, "Analysis and design of electrothermal actuators fabricated from single crystal silicon," Proc. ASME IMECE, Orlando, FL: 233- 240.
    • (2000) Proc. ASME IMECE , pp. 233-240
    • Maloney, J.M.1    Devoe, D.L.2    Schreiber, D.S.3
  • 8
    • 0035368251 scopus 로고    scopus 로고
    • Bent-beam electrothermal actuators - Part I: Single beam and cascaded devices
    • Que, L. Q., Park, J.-S., and Gianchandani, Y. B., 2001, "Bent-beam electrothermal actuators - part I: single beam and cascaded devices," J. Microelectromechanical Systems, 10: 247-254.
    • (2001) J. Microelectromechanical Systems , vol.10 , pp. 247-254
    • Que, L.Q.1    Park, J.-S.2    Gianchandani, Y.B.3
  • 9
    • 0030182958 scopus 로고    scopus 로고
    • Electrothermal responses of lineshape microstructures
    • Lin, L., and Chiao, M., 1996, "Electrothermal responses of lineshape microstructures," Sensors and Actuators, A55: 35-41
    • (1996) Sensors and Actuators , vol.A55 , pp. 35-41
    • Lin, L.1    Chiao, M.2
  • 10
    • 36149002185 scopus 로고
    • Electrical properties of pure silicon and silicon alloys containing boron and phosphorous
    • Pearson, G. L., and Bardeen, J., 1949, "Electrical properties of pure silicon and silicon alloys containing boron and phosphorous," Physical Review, 75.
    • (1949) Physical Review , vol.75
    • Pearson, G.L.1    Bardeen, J.2
  • 13
    • 0021463798 scopus 로고
    • Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K
    • Okada, Y., and Tokumaru, Y., 1984, "Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K," J. Applied Physics, 56: 314-320.
    • (1984) J. Applied Physics , vol.56 , pp. 314-320
    • Okada, Y.1    Tokumaru, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.