Chemical sensor based on quartz microresonators

Journal of Microelectromechanical Systems

Volumn 5, Issue 2, 1996, Pages 138-140

  Vig, John R ^a,b   Filler, Raymond L ^a,c   Kim, Yoonkee ^b  

^a IEEE

^b U S ARMY RESEARCH LABORATORY   (United States)

^c US Army Communications and Electronics Command   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CALORIMETERS; CRYSTAL RESONATORS; DEPOSITION; MICROELECTROMECHANICAL DEVICES; THERMAL EFFECTS; THIN FILM DEVICES;

BIOLOGICAL AGENTS; FREQUENCY CHANGE; MASS CHANGES; QUARTZ CRYSTAL MICROBALANCE; QUARTZ MICRORESONATORS; TEMPERATURE CHANGES; THIN FILM ADSORBERS;

CHEMICAL SENSORS;

EID: 0030173980     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.506202     Document Type: Article

References (12)

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2. V. E. Bottom, introduction to Quartz Crystal Unit Design. New York: Van Nostrand Reinhold, 1982.
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