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Journal of Applied Physics

Volumn 87, Issue 3, 2000, Pages 1550-1555

Isotopic labeling studies of interactions of nitric oxide and nitrous oxide with ultrathin oxynitride layers on silicon

(7) Lu, H C a Gusev, E P a,c Garfunkel, E a Busch, B W a Gustafsson, T b Sorsch, T W b Green, M L b

a RUTGERS UNIVERSITY (United States)

b LUCENT TECHNOLOGIES (United States)

c IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001142029 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.372048 Document Type: Article

Times cited : (21)

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