Femtosecond laser three-dimensional micro-and nanofabrication

Applied Physics Reviews

Volumn 1, Issue 4, 2014, Pages

  Sugioka, Koji ^a   Cheng, Ya ^b  

^a Institute of Physical and Chemical Research   (Japan)

^b SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; ELECTROMECHANICAL DEVICES; FABRICATION; FLUIDIC DEVICES; FUNCTIONAL POLYMERS; GLASS; GLASS BONDING; HEAT AFFECTED ZONE; INTERFACES (MATERIALS); IRRADIATION; LASER APPLICATIONS; LASER MATERIALS PROCESSING; LASER PULSES; MANUFACTURE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROFLUIDICS; MULTIPHOTON PROCESSES; NANOTECHNOLOGY; PHOTONIC DEVICES; SUBSTRATES; TISSUE ENGINEERING; ULTRAFAST LASERS;

FOCUSED FEMTOSECOND LASERS; INTERNAL MODIFICATIONS; MICRO AND NANOSTRUCTURES; MICRO-FLUIDIC DEVICES; MULTI-PHOTON ABSORPTION; NONLINEAR INTERACTIONS; THREEDIMENSIONAL (3-D); TWO PHOTON POLYMERIZATION;

ULTRASHORT PULSES;

EID: 85006371810     PISSN: None     EISSN: 19319401     Source Type: Journal    
DOI: 10.1063/1.4904320     Document Type: Review

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