Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining

Microfluidics and Nanofluidics

Volumn 11, Issue 1, 2011, Pages 111-117

  Ju, Yongfeng ^a,b   Liao, Yang ^a   Zhang, Long ^a   Sheng, Yinglong ^a,b   Zhang, Qiang ^a,b   Chen, Danping ^a   Cheng, Ya ^a   Xu, Zhizhan ^a   Sugioka, Koji ^c   Midorikawa, Katsumi ^c  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c RIKEN   (Japan)

Author keywords

Femtosecond laser; Large volume; Microfluidic chamber; Three dimensional micromachining

Indexed keywords

CHANNEL STRUCTURES; FEMTO-SECOND LASER; FEMTOSECOND LASER MICROMACHINING; FOCUSED FEMTOSECOND LASERS; GLASS SAMPLES; HOLLOW STRUCTURE; LARGE SIZES; LARGE VOLUME; MICRO-CHAMBERS; MICROFLUIDIC CHAMBER; MICROFLUIDIC CHAMBERS; MICROFLUIDIC CHANNEL; POROUS GLASS; THREE-DIMENSIONAL MICROMACHINING; TRANSPARENT GLASS;

COMPOSITE MICROMECHANICS; FABRICATION; FLOW MEASURING INSTRUMENTS; GLASS; MICROFLUIDICS; MICROMACHINING; SINTERING; SUBSTRATES; THREE DIMENSIONAL; ULTRASHORT PULSES;

GLASS LASERS;

EID: 82655182990     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-011-0790-9     Document Type: Article

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