Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

Nature Communications

Volumn 4, Issue , 2013, Pages

  Gan, Zongsong ^a   Cao, Yaoyu ^a   Evans, Richard A ^b   Gu, Min ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

MONOMER;

NANOTECHNOLOGY; OPTICAL METHOD; RESIN; STRENGTH;

ARTICLE; LIGHT ABSORPTION; NANOFABRICATION; PHOTON; POLYMERIZATION; STRENGTH; THREE DIMENSIONAL OPTICAL BEAM LITHOGRAPHY;

EID: 84879618092     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms3061     Document Type: Article

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