Properties of zinc oxide films grown on sapphire substrates using high-temperature H2O generated by a catalytic reaction on platinum nanoparticles

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 2, 2014, Pages

  Yasui, Kanji ^a   Takeuchi, Tomohiko ^a   Nagatomi, Eichi ^a   Satomoto, Souichi ^a   Miura, Hitoshi ^a   Kato, Takahiro ^a   Konya, Takayuki ^b  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b RIGAKU CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CATALYSIS; ELECTRON MOBILITY; II-VI SEMICONDUCTORS; METALLIC FILMS; NANOPARTICLES; OXIDE FILMS; PLATINUM; SAPPHIRE; SECONDARY ION MASS SPECTROMETRY; ZINC OXIDE;

BORON CONCENTRATIONS; CATALYTIC REACTIONS; HIGH ELECTRON MOBILITY; HYDROGEN CONCENTRATION; PLATINUM NANO-PARTICLES; RESIDUAL CARRIER CONCENTRATION; SAPPHIRE SUBSTRATES; SECONDARY ION MASS SPECTROSCOPY;

GROWTH RATE;

EID: 84961326030     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4831969     Document Type: Article

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