Frictional Characteristics of Sub-100-μm Borosilicate Glass Balls for Actuator Applications

Journal of Microelectromechanical Systems

Volumn 24, Issue 6, 2015, Pages 2161-2169

  Kim, Jae Kang ^a   Yoo, Shin Sung ^a   Nemati, Narguess ^b   Kim, Dae Eun ^a  

^a Yonsei University   (South Korea)

^b UNIVERSITY OF TEHRAN   (Iran)

Author keywords

Actuators; bearings (mechanical); electromagnetic forces; friction; reliability testing; wear

Indexed keywords

ACTUATORS; DURABILITY; FRICTION; GOLD; LINEAR ACTUATORS; SILICON; TRIBOLOGY;

FRICTION COEFFICIENTS; FRICTIONAL CHARACTERISTICS; LOW FRICTION COEFFICIENTS; ROLLING ELEMENTS; ROLLING FRICTION; SILICON SURFACES; SOLID LUBRICATING FILMS; THICKNESS OF THE FILM;

BOROSILICATE GLASS;

EID: 84959454765     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2015.2478838     Document Type: Article

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