Design, fabrication, and characterization of a rotary micromotor supported on microball bearings

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 632-642

  Ghalichechian, Nima ^a,b   Modafe, Alireza ^a,c   Beyaz, Mustafa Ilker ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b FORMFACTOR INC   (United States)

^c MICRON TECHNOLOGY INC   (United States)

Author keywords

Electrodes; Fabrication; Microball bearings; Micromotors; Rotors; Silicon; Stators; Torque; Variable capacitance

Indexed keywords

ARCHITECTURAL DESIGN; BEARINGS (STRUCTURAL); BUTENES; CHEMICAL MODIFICATION; COMPUTER NETWORKS; DYNAMIC RESPONSE; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; FRICTION; GOLD; HOUSING; IRON; LITHOGRAPHY; NONMETALS; ROTORS (WINDINGS); SILICON; SILICON CARBIDE; STATORS; STRUCTURAL DESIGN; TECHNOLOGY; TRIBOLOGY;

(+ MOD 2N) OPERATION; (100) SILICON; (OTDR) TECHNOLOGY; 3D FINITE ELEMENT (FE) SIMULATION; BENZOCYCLOBUTENE (BCB) POLYMER; CO-EFFICIENT OF FRICTION (COF); COOLING APPLICATIONS; FINITE ELEMENT (FE); LINEAR MICROMOTORS; MAXIMUM OUTPUT; MECHANICAL POWERS; MECHANICAL SUPPORTS; MICRO BALL BEARINGS; MICRO MACHINING; MICRO MOTORS; MICRO-PUMPS; NONCONTACT METHODS; PLATFORM TECHNOLOGY; RESPONSE MEASUREMENTS; SILICON (111) SUBSTRATES; SILICON CARBIDE (SIC) FILMS; TIP VELOCITY; TWO LAYERS; VARIABLE CAPACITANCE MICROMOTOR;

MECHANICS;

EID: 45449099948     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.916346     Document Type: Article

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