Micro rotary ball bearing with integrated ball cage: Fabrication and characterization

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 687-690

  Hergert, Robert ^a   Ku, Ingrid S Y ^a   Reddyhoff, Tom ^a   Holmes, Andrew S ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BEARING DESIGNS; BULK SILICON; DEEP GROOVE; LOW SPEED; MICROMACHINED SILICON; RUNNING TORQUE; STEEL BALLS;

BALL BEARINGS; BEARINGS (STRUCTURAL); MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SPHERES;

SILICON WAFERS;

EID: 77952769529     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442313     Document Type: Conference Paper

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