Isotropic etching technique for three-dimensional microball-bearing raceways

Journal of Micromechanics and Microengineering

Volumn 24, Issue 1, 2014, Pages

  Hanrahan, B ^a,b   Waits, C M ^b   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARING DYNAMICS; ETCHING NON-UNIFORMITY; HIGH-SPEED OPERATION; INDUCTIVELY-COUPLED; ISOTROPIC ETCHING; MICRO TURBINE; PLASMA ETCHING TECHNIQUE; RACEWAY DEPTH;

CURVE FITTING; INDUCTIVELY COUPLED PLASMA; PLASMA ETCHING;

DEEP GROOVE BALL BEARINGS;

EID: 84891110156     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/1/015021     Document Type: Article

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