A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Sensors and Actuators, A: Physical

Volumn 127, Issue 1, 2006, Pages 131-138

  Kanda, Takefumi ^a,d,e,f,g,h   Makino, Akira ^a,i   Ono, Tomohisa ^a   Suzumori, Koichi ^a,e,f,g,h   Morita, Takeshi ^b   Kurosawa, Minoru Kuribayashi ^c,d,e,j,k  

^a OKAYAMA UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^d Japan Society for Precision Engineering   (Japan)

^e Institute of Electrical Engineers of   (Japan)

^f IEEE   (Japan)

^g Japan Society of Mechanical Engineers   (Japan)

^h Robotics Society of   (Japan)

ⁱ NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^j Institute of Electronics Information and Communication Engineers   (Japan)

^k Acoustical Society of   (Japan)

more..

Author keywords

Bulk piezoelectric material; Micro machining; Micro motor; Piezoelectric actuator; Ultrasonic motor

Indexed keywords

BULK PIEZOELECTRIC MATERIAL; MICRO MOTOR; STATOR TRANSDUCER; ULTRASONIC MOTOR;

CERAMIC MATERIALS; LASER BEAM CUTTING; MICROMACHINING; NICKEL PLATING; PIEZOELECTRIC TRANSDUCERS;

ULTRASONIC EQUIPMENT;

EID: 32844458406     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.056     Document Type: Article

References (10)

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