Design of ultraprecision machine tools with applications to manufacture of miniature and micro components

Journal of Materials Processing Technology

Volumn 167, Issue 2-3, 2005, Pages 515-528

  Luo, Xichun ^a,c   Cheng, Kai ^a   Webb, Dave ^a   Wardle, Frank ^b  

^a LEEDS METROPOLITAN UNIVERSITY   (United Kingdom)

^b Loadpoint Ltd   (United Kingdom)

^c CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

3D microstructures and devices; Bench type ultraprecision machines; Miniature and micro components manufacturing; Ultraprecision machines design; Ultraprecision machining

Indexed keywords

FABRICATION; MACHINE COMPONENTS; MACHINE DESIGN; MACHINING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PRODUCTIVITY;

3D MICROSTRUCTURES AND DEVICES; BENCH-TYPE ULTRAPRESICION MACHINES; MINIATURE AND MICRO-COMPONENTS; ULTRAPRECISION MACHINE DESIGN; ULTRAPRECISION MACHINING;

MACHINE TOOLS;

EID: 23844545591     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2005.05.050     Document Type: Article

References (29)

1. P.A. McKeown From micro-to nano-machining-towards the nanometre era Sens. Rev. 16 2 1996 4 10
2. B. Wybranski Micro production technologies mstNews 2 2004 43 45
3. M. Weck Ultraprecision machining of microcomponents Mach. Tools 2000 113 122
4. A.H. Slocum Precision Machine Design 1992 Englewood Cliffs Prentice-Hall
5. P. Schellekens, and N. Rosielle Design for precision: current status and trends Ann. CIRP 47 2 1998 557 584
6. D.J. Stephenson, D. Veselovac, S. Manley, and J. Corbett Ultra-precision grinding of hard steels Precision Eng. 15 2001 336 345
7. H. Shinno, H. Hashizume, Y. Ito, and C. Sato Structural configuration and performances of machining environment-controlled ultraprcision diamond turning machine 'capsule' Ann. CIRP 41 1 1992 425 428
8. N. Ikawa, R.R. Donaldson, R. Kormanduri, W. KÖnig, T.H. Aachen, P.A. Mckeown, T. Moriwaki, and I.F. Stowers Ultraprecision metal cutting - the past, the present and the future Ann. CIRP 40 2 1991 587 594
9. P. Stanev, F. Wardle, J. Corbett, Grooved hybrid air bearings, http://www.loadpoint.co.uk/site2/grooved.pdf (accessed on 8th December 2003).
10. B. Leifheim, Precision and ultraprecision machine tools. Euspen online lecture, http://www.euspen.org/training/lectures/course2free2view/ 03PrecisionUltraTool/demolecture.asp (accessed on 8th December 2003).
11. M. Weck, S. Fischer, and M. Vos Fabrication of microcomponents using ultraprecision machine tools Nanotechnology 8 1997 145 148
12. H. Nakazawa Principles of Precision Engineering 1994 Oxford University Press New York
13. B. Cassin, Recent C & B Axis Development from Moore Nanotechnology Systems, LLC, http://www.nanotechsys.com/images/PDFs/ RecentC&BAxisDevelopments.PDF (accessed on 30 March 2005).
14. Nanotech 350 UPL Brochure, Moore Nanotechnology Systems Ltd., http://www.nanotechsys.com (accessed on 15 March 2005).
15. Nanotech 500 FG brochure, Moore Nanotechnology Systems Ltd., http://www.nanotechsys.com (accessed March 2005).
16. PicoAce brochure, Loadpoint Ltd., http://www.loadpoint.co.uk/picoace/ picoace.htm (accessed on 5th January 2004).
17. ® MM, Kugler Company Brochure, www.kugler-precision.com (accessed on December 2003).
18. Robonano α-0iA brochure, Fanuc Ltd., http://www.fanuc.jo/en/ product/robonano (accessed on 12th December 2003).
19. O. Rübenach, Micro Technology - Applications and Trends, Euspen Online Training Lecture, http://www.euspen.org/training/lectures/ course2free2view/02MicroTechApps/demolecture.asp (accessed on 18th December 2003).
20. A. EI-Fatatry, and A. Correial Nanotechnology in microsystems: potential influence for transmission systems and related applications mstNews 3 2003 25
21. H. Huang, W.K. Chen, L. Yin, Z. Xiong, U.C. Liu, and P.L. Peo Micro/meso ultraprecision grinding of fibre optic connectors Precision Eng. 28 1 2004 95 105
22. KERN Micro- und Feinwerktechnik GmbH & Co. KG, http://www.kern- microtechnic.com (accessed on 23rd March 2005).
23. J. Webster, and M. Tricard Innovations in abrasive products for precision grinding Ann. CIRP 53 2 2004 597 642
24. M. Chen, D. Li D, S. Dong, and F. Zhang Factors influencing the surface quality during ultra-precision grinding of brittle materials in ductile mode Key Eng. Mater. 257-258 2003 201 206
25. J. Gabler, H.-W. Hoffmeister, B. Menze, and L. Schafer Micro-abrasive pencils with CVD diamond coating Diamond Relat. Mater. 13 3-7 2003 707 710
26. X. Liu, R.E. Devor, and S.G. Kapoor The mechanics of machining at the microscale: assessment of the current start of the science Trans. ASME: J. Manuf. Sci. Eng. 126 2004 666 678
27. Accessed on 9th May 2005 http://www.rockwellautomation.com/anorad/ products/linearmotors/.
28. X. Luo, K. Cheng, and R. Holt An investigation on the mechanics of nanometric cutting and the development of its test-bed Int. J. Prod. Res. 41 7 2003 1149 1165
29. Accessed on 9th May 2005 www.masmicro.net.