MEMS rotary actuator using an integrated ball bearing and air turbine

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1131-1134

  Waits, C M ^a,b   Jankowski, N R ^b   Geil, B ^b   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

MEMS Tribology; Microball Bearings; Microturbine

Indexed keywords

ACTUATORS; BEARINGS (STRUCTURAL); ELECTRIC GENERATORS; GAS TURBINES; MECHANISMS; MICROSYSTEMS; NONMETALS; SENSORS; SILICON; SPEED; TRANSDUCERS; TURBINES;

ACTUATION MECHANISM; BEARING SUPPORT; CONTINUOUS OPERATIONS; INTERNATIONAL CONFERENCES; MEMS TRIBOLOGY; MICROBALL BEARINGS; MICROTURBINE; QUALITATIVE ANALYSIS; ROTATIONAL SPEEDS; SHEDDING LIGHT; SOLID-STATE SENSORS;

BALL BEARINGS;

EID: 50049121051     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300334     Document Type: Conference Paper

References (7)

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3. th IEEE Int. Conf. MEMS, Piscataway, NJ, pp. 290-293, 2001.
4. T-W. Lin, A. Modafe, B. Shapiro and R. Ghodssi, "Characterization of Dynamic Friction in MEMS-Based Micro-Ball Bearings," IEEE Trans on Inst. and Meas., Vol. 53, No. 3, pp. 839-846, 2004.
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6. C. M. Waits, R. Ghodssi, and B. Geil "Rotary Ball Bearing Platform for Advanced Power MEMS Components," Proc. of Power MEMS '06, Berkeley, CA, USA, Nov 29-Dec 1, 2006.
7. C.M. Waits, B. Geil, and R. Ghodssi, "Encapsulated ball bearings for rotary micro machines," submitted to JMM, February 2007.