Silicon retainer ring integration in micro-turbine with thrust ball bearing support mechanism

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1344-1347

  Hergert, R J ^a,b   Hanrahan, B ^b,c   Holmes, A S ^a   Ghodssi, R ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF MARYLAND   (United States)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

micro ball bearing; Micro turbine; rotary MEMS

Indexed keywords

MACRO SCALE; MICRO BALL BEARINGS; MICRO PUMP; MICRO TURBINE; MICROFABRICATED; ROTARY MEMS; STABLE OPERATION; SUPPORT SYSTEMS; THRUST BALL BEARINGS;

ACTUATORS; ELECTROSTATIC DEVICES; INTEGRATION; MICROFABRICATION; MICROSYSTEMS; SOLID-STATE SENSORS; SPHERES; THRUST BEARINGS; TURBINES;

BALL BEARINGS;

EID: 80052113491     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969503     Document Type: Conference Paper

References (5)

1. R. Hergert, I. S. Y. Ku, T. Reddyhoff, A.S. Holmes, "Micro rotary ball bearing with integrated ball cage: Fabrication and characte erization," Proc. of MEMS 2010, pp. 687-690, Hong g Kong, China, 2010.
2. C. M. Waits, M McCarthy, R. Ghodssi, "A Microfabricated Spiral-Groove Turbopump Supported on Microball Bearings," JMEMS, 19, pp. 99-109, Feb 2010.
3. M. McCarthy, C. M. Waits, M. I. Byaz, R. Ghodssi, "A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance," JMM, 19, 2009
4. B. Hanrahan, M. Beyaz, M. McCarthy, C. M. Waits, R. Ghodssi, "A New Performance Regime for Microfabricated Ball Bearings," in Proc. of PowerMEMS '10, pp. 191-194, Leuven, Belgium, 2010.
5. M. McCarthy, C. M. Waits, and R. Ghodssi, "Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing using an Integrated Microturbine," JMEMS, vol. 18, no. 2, pp. 263-273, April 2009.