Development of a high precision coplanar stage by using miniature Michelson interferometer

International Journal of Precision Engineering and Manufacturing

Volumn 15, Issue 11, 2014, Pages 2251-2256

  Fan, Kuang Chao ^a,b   Zhou, Hao ^a   Li, Ruijun ^a  

^a HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Abbe error; Back propagation neural network; Coplanar XY stage; Motion control

Indexed keywords

BACKPROPAGATION; COORDINATE MEASURING MACHINES; LASER INTERFEROMETRY; MICHELSON INTERFEROMETERS; MOTION CONTROL; THREE TERM CONTROL SYSTEMS; TORSIONAL STRESS;

ABBE ERRORS; BACK PROPAGATION NEURAL NETWORKS; LASER INTERFEROMETER; MINIATURE LASERS; NANO-POSITIONING; POSITIONING ACCURACY; STANDARD DEVIATION; XY STAGE;

NEURAL NETWORKS;

EID: 84912080849     PISSN: 22347593     EISSN: 20054602     Source Type: Journal    
DOI: 10.1007/s12541-014-0588-2     Document Type: Article

References (12)

1. Fan, K. C., Fei, Y. T., Yu, X. F., Chen, Y. J., Wang, W. L., et al., “Development of a Low-Cost Micro-CMM for 3D Micro/Nano Measurements,” Measurement Science and Technology, Vol. 17, No. 3, pp. 524–532, 2006.
2. Fan, K. C., Cheng, F., Wang, H. Y., and Ye, J. K., “The System and the Mechatronics of a Pagoda Type Micro-CMM,” International Journal of Nanomanufacturing, Vol. 8, No. 1, pp. 67–86, 2012.
3. Cheng, F. and Fan, K. C., “Linear Diffraction Grating Interferometer with High Alignment Tolerance and High Accuracy,” Applied Optics, Vol. 50, No. 22, pp. 4550–4556, 2011.
4. Fan, K. C., Zhang, Y. L., Miao, J. W., and Cheng, F., “Error Compensation of Grating Interferometer due to Angular Error of Linear Stage,” Proc. of IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 428–431, 2012.
5. Kramar, J. A., “Nanometre Resolution Metrology with the Molecular Measuring Machine,” Measurement Science and Technology, Vol. 16, No. 11, pp. 2121–2128, 2005.
6. Liu, C. H., Jywe, W. Y., Jeng, Y. R., Hsu, T. H., and Li, Y. T., “Design and Control of a Long-Traveling Nano-Positioning Stage,” Precision Engineering, Vol. 34, No. 3, pp. 497–506, 2010.
7. Polit, S. and Dong, J., “Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing,” IEEE/ASME Transactions on Mechatronics, Vol. 16, No. 4, pp. 724–733, 2011.
8. Fan, K. C., Cheng, F., and Chen, Y. J., “Nanopositioning Control on a Commercial Linear Stage by Software Error Correction,” Nanotechnology and Precision Engineering, Vol. 4, No. 1, pp. 1–9, 2006.
9. Fan, K. C. and Lai, Z. F., “An Intelligent Nano-Positioning Control System Driven by an Ultrasonic Motor,” Int. J. Precis. Eng. Manuf., Vol. 9, No. 3, pp. 40–45, 2008.
10. Cheng, F., Fan, K. C., Miao, J., Li, B. K., and Wang, H. Y., “A BPNN-PID based Long-Stroke Nanopositioning Control Scheme Driven by Ultrasonic Motor,” Precision Engineering, Vol. 36, No. 3, pp. 485–493, 2012.
11. Fan, K. C. and Cheng, F., “LDGI Signal Subdivision by Soft Computing for Nanomeasurement,” Proc. of 6th International Symposium on Precision Engineering Measurements and Instrumentation, Vol. 7544, 2010.
12. Omatu, S. and Yoshioka, M., “Self-Tuning Neuro-Pid Control and Applications,” Proc. of IEEE International Conference on Systems, Man, and Cybernetics, pp. 1985–1989, 1997.